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Sensitive and Selective Photo Acoustic Gas Sensor Suitable for High Volume Manufacturing

Sammendrag

Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterisation of a photo acoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 ¿V/V/Pa. 12 prototypes for measuring CO2 have been characterised. Detection limits ranging from 92 ppm to below 6 ppm CO2 were obtained, depending on the measurement time and photo acoustic cell design. No cross-sensitivity towards CO, CH4, or humidity could be observed in any of the sensors. The temperature drift of the uncompensated raw signal of two sensor designs was below 117 ppm CO2 in the range from 25°C to 50°C. ""Best Poster Award""

Kategori

Vitenskapelig Kapittel/Artikkel/Konferanseartikkel

Språk

Engelsk

Forfatter(e)

  • Kari Schjølberg-Henriksen
  • Alain Marc C Ferber
  • Sigurd Moe
  • Dag Thorstein Wang
  • Ralph W. Bernstein
  • Henrik Rogne
  • O. Schulz
  • M. Lloyd
  • K.-H. Suphan
  • G. Müller

Institusjon(er)

  • SINTEF Digital / Smart Sensors and Microsystems

År

2006

Forlag

IEEE

Bok

5th IEEE Conference on Sensors, 2006

ISBN

1424403766

Side(r)

679 - 682

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