piezoMEMS modelling
The way of designing a piezoMEMS component will be revolutionary changed by constructing a MEMS device based on 3D parametric library components with underlying accurate behaviour models.

COVENTOR is a leading provider of 3D analysis and design automation software for the development of micro- and nano-scale devices and systems and will:

  • develop new models as well as optimize current modelling techniques to address modelling of novel piezoMEMS designs. Different modelling methods, such as Finite-Element-Methods and behavioural modelling libraries will be considered. These tools will be generic of piezoMEMS.
  • develop a process design kit (PDK) dedicated to the piezoMEMS based on SINTEF’s moveMEMS PZT process. The design kits will allow easier design access for fabless product companies, which is especially important for SMEs since traditionally only larger companies could afford the access to MEMS knowledge.
  • create a design tutorial that explains how to create a new piezoMEMS design and how to conduct relevant modelling steps.
  • establish a catalogue of piezoMEMS design examples and case studies.

PZT Design kit

In terms of modelling the manufacturing processes, there are two approaches: simulations and emulation. The Process Simulation approach uses 3D numerical simulation to produce highly accurate models of the effects of chemical reactions involved in fabrication. The variety of process steps in MEMS fabrication, the large number of inputs, and the complexity of the calculations, however, render process simulation extremely time consuming or in most cases just not possible – due to the lack of adequate simulation tools. For MEMS applications, the process emulation approach is therefore preferred, which takes 2D masks and a description of the fabrication process to create a geometric 3D solid model. These models are built rather quickly and can subsequently be used for physical modelling.

Published April 22, 2010

3D model of piezoresonator
3D model of piezoresonator

Piezo beam with RLC
Piezo beam with RLC


The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2010-2013) under grant agreement n° 229196