piezoVolume devices
The feasibility of the three different piezoMEMS device prototypes have been made with three standard process alternatives using a multi project wafer (MPW) approach. The MEMS-prototypes developed for the end-users during the project provide generic, fundamentally general, structures suited to illustrate basic design characteristics and also well suited for device testing.
First piezoVolume devices
Sonitor's ultrasonic microphone arrays will be tested for sensitivity and frequency response, primarily between 35 and 45 kHz, which is the relevant frequency band for indoor real-time location systems (RTLS). The angular resolution that can be obtained by the phased arrays in practical systems will be investigated.
Océ's membrane actuators for ink-jet printing heads will be subjected to several tests, firstly to validate the necessary deflection needed for successful droplet ejection. These experiments will be performed in different frequency ranges using standard sine pulse as well as those typically utilized in jetting processes. An accelerated mechanical durability test is also under way, typically driving the device at low voltage but on resonance frequency. Perhaps the most challenging test is to test electrical device durability by the application of unipolar voltage excitation profiles with typically 10exp(10) cycles. The combination of these tests should provide sufficient information on the usability for further applications.
Vermon's transducers for ultrasound imaging will be subject to a series of tests and performance assessment to benchmark with existing products. The transducer electrical behaviour will be evaluated in terms of impedance and capacitance within its operating frequency range. The homogeneity of the response will be a critical criterion for ultrasonic imaging applications. In parallel with the electrical assessment, acoustic performance measurements provide acoustic radiation patterns of individual transducer (array) elements loaded by water or tissue mimicking media. Finally, all the characteristics of the transducers will be qualified with respect to the transmission line and the electronics for transmit and receive functions.

Published March 27, 2012

The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2010-2013) under grant agreement n° 229196