Project related research activities
Current national and international research activities relevant to the project


  • NORD-pie (NICe, “Piezoelectric Microsystems for Industry in the Nordic Countries”)
  • microBUILDER (FP6, “An integrated modular service for microfluidics”)
  • e-CUBES (FP6, “3D Integrated Micro/Nano Modules For Easily Adapted Applications”)


  • MIND (FP6 NoE, “Multifunctional & Integrated Piezoelectric Devices”)
  • Swiss CTI project ("New materials for thin film BAW devices")
  • 3D-DEMO (FP6, “Single step 3D DEposition of complex nanopatterned Multifunctional Oxides thin films”)
  • MUSTWIN (FP6, “Micro-machined Ultrasound Transducer for Wide range applications in Medical Imaging and NDT”)


  • Swiss national CTI Project Oerlikon-EPFL: “New materials for thin film BAW devices”, 30months, start 1.1.2006, Project nr. 7925.1


  • MicroNED (Dutch 'Microsystem and Nanotechnology' Theme)
  • SmartPIE (SmartMIX, “SMART systems based on integrated Piezo”)


  • microBUILDER (FP6, “An integrated modular service for microfluidics and mixed technology”)
  • CORONA (FP7, “Customer-Oriented Product Engineering of Micro and Nano Devices)


Published April 26, 2010

The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2010-2013) under grant agreement n° 229196