The main concept of piezoVolume was to develop a platform of integrated processes for production of piezoelectric microsystems. The platform covers the complete microfabrication process chain and enables cost-effective medium and large scale production. A set of procedures, guidelines and tools have been developed, enabling short time to market for new device concepts. The capacity is 2.5 Millions of 1x1 cm2 devices per year from 10 000 200 mm wafers.
Readily available cost-effective wafer based batch processing of piezoMEMS lowers the threshold for industry acceptance of piezoMEMS and is enabling to realise new products based on piezoMEMS.
piezoVolume has provided:Validated manufacturing proceduresDesign handbooks and modelling toolsApplication examples Infrastructure for production and testing
Published April 21, 2010
The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2010-2013) under grant agreement n° 229196