Sputter cluster

High volume piezoelectric thin film production process for microsystems

In the FP7 project piezoVolume (2010-2012), leading research groups and technological partners have built a full production line for piezoMEMS in Europe.
The project was finished in 2012. Updated information can be found on www.piezomicrosystems.com.


piezoVolume devices


Logos for all partners


Project coordinator Frode Tyholdt
P.O.Box 124 Blindern
0314 Oslo, Norway
Phone: +47 91 75 82 74

The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2010-2013) under grant agreement n° 229196