Piezoelectric MEMS can fulfil many of the requirements of future smart devices:
Piezoelectric thin films can be useful in:
Within the field of microfluidics, PZT can be utilized for making pumps and valves. For acoustic applications, piezoelectric micromachined ultrasonic transducers (pMUT’s) can be used for both sending and receiving ultrasound. Within optics, bending mode actuators can be used for making spectrometers (Fabry‐Perot and FTIR) and mirrors as well as coherence modifying devices.
sensors andenergy conversion
with resonantultrasound excitation
Published January 2, 2018