About piezoMEMS

Piezoelectric MEMS can fulfil many of the requirements of future smart devices:

  • Low power requirements
  • Small volume
  • High performance
  • Ease of manufacture

Piezoelectric thin films can be useful in:

  • Ultrasonic imaging transducers
  • Positioning systems
  • Pressure and flow sensors
    (e.g. disposable blood pressure sensors)
  • Gas sensors
  • Energy harvester
  • Accelerometers
    (e.g. for airbag deployment in collisions)
  • Micropumps

Within the field of microfluidics, PZT can be utilized for making pumps and valves. For acoustic applications, piezoelectric micromachined ultrasonic transducers (pMUT’s) can be used for both sending and receiving ultrasound. Within optics, bending mode actuators can be used for making spectrometers (Fabry‐Perot and FTIR) and mirrors as well as coherence modifying devices.

Direct effect:

Converse effect:

Converse effect:

Both effects in resonance:

sensors and
energy conversion

linear actuators

with resonant
ultrasound excitation

resonant transducer

  • Vibration sensor
  • Accelerometer
  • Microphone
  • Photoacoustic sensors
  • Energy scavenging
    from vibrations
  • Vibration damper
  • Optical scanner
  • Optical switch
  • Micro and nano probes
  • Switch/relay, RF switch
  • Valve
  • Droplet ejector, inkjet
  • Ultrasonic stator
    for micromotor
  • Liquid delivery
  • Ultrasonic imaging
  • RF filters
  • Transformers
  • Proximity sensors



Published January 2, 2018