CMUT ARRAYS WITH POLYSILICON BOTTOM ELECTRODES AND NANO-METER PRECISION CAVITY GAPS
Category
Poster
Language
English
Author(s)
- Jon Due-Hansen
- Kjersti Midtbø
- Erik Poppe
- Anand Summanwar
- Geir Uri Jensen
- Lars Breivik
- Dag Thorstein Wang
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Norwegian University of Science and Technology
Presented at
MicroMechanics Europe
Place
Tønsberg
Date
19.06.2011 - 22.06.2011