Edgeless silicon sensors fabricated without support wafer
Category
Academic article
Language
English
Author(s)
- Ozhan Koybasi
- Jiaguo Zhang
- Angela Kok
- Anand Summanwar
- Marco Povoli
- Lars Breivik
- Anna Bergamaschi
- Bernd Schmitt
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Paul Scherrer Institute
Year
2019Published in
Nuclear Instruments and Methods in Physics Research Section A : Accelerators, Spectrometers, Detectors and Associated Equipment
ISSN
0168-9002
Volume
953