Applications of PZT-based micromirrors
Category
Academic lecture
Language
English
Author(s)
- Thor Bakke
- Paul Wittendorp
- Zeljko Skokic
- Frode Tyholdt
- Andreas Vogl
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Unknown
Presented at
piezoMEMS workshop 2016
Place
Grenoble
Date
24.05.2016 - 25.05.2016
Organizer
CEA LETI