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High Volume Piezoelectric Thin Film Production Process for Microsystems

High Volume Piezoelectric Thin Film Production Process for Microsystems

Category
Conference lecture and academic presentation
Language
English
Author(s)
Affiliation
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
Commercialization of Micro-, Nano-, and Emerging Technologies (COMS) 2012
Place
T√łnsberg, Norway
Date
23.07.2012 - 26.07.2012
Organizer
MANCEF
Year
2012