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Taking piezoelectric microsystems from the laboratory to production

Taking piezoelectric microsystems from the laboratory to production

Category
Conference lecture and academic presentation
Abstract
Piezoelectric thin films can meet the needs for actuation and sensing in micro electro-mechanical systems (MEMS). Even though piezoelectric films for MEMS have been prepared and used at a laboratory scale for many years there are few companies that offer this technology at an industrial scale. Industries that use piezoelectric thick film or bulk elements today see a need for smaller devices with improved functionality and reduced energy consumption. Thus, developers need a standardized piezoelectric film process that can deliver reliable and reproducible actuation for the next generation of MEMS devices.   Transferring knowledge from laboratories to industrial production is indeed challenging. Reliability and reproducibility are crucial parameters that have to be addressed. This can be translated into e.g. device performance across a wafer and from wafer to wafer, lifetime, stability and yield. The challenges when integrating thin piezoelectric films into an industrial process will be presented together with parameter statistics. A system for automated poling and electrical testing of a whole wafer will also be presented.
Language
English
Author(s)
Affiliation
  • SINTEF Industry / Materials and Nanotechnology
  • SINTEF Digital / Microsystems and Nanotechnology
Presented at
Electroceramics X
Place
Toledo, Spain
Date
17.06.2006 - 21.06.2006
Organizer
Sociedad Española de Cerámica y Vidrio, Spain
Year
2006