Dry-film resist technology for versatile TSV fabrication for MEMS, tested on blind dummy TSVs
Category
Academic chapter/article/Conference paper
Client
- Research Council of Norway (RCN) / 210601
Language
English
Author(s)
- Nicolas Lietaer
- Anand Summanwar
- Sara Rund Herum
- Leny Nazareno
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Year
2014Publisher
EDA Publishing Association
Book
Symposium on Design, test, Integration & Packaging of MEMS/MOEMS, Cannes, France, 1-4 April, 2014
ISBN
9782355000287
Page(s)
351 - 355