Dry-film resist technology for versatile TSV fabrication for MEMS, tested on blind dummy TSVs
Category
Academic lecture
Client
- Research Council of Norway (RCN) / 210601
Language
English
Author(s)
- Nicolas Lietaer
- Anand Summanwar
- Sara Rund Herum
- Leny Nazareno
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
DTIP
Place
Cannes
Date
01.04.2014 - 04.04.2014
Organizer
CMP