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Sensitivity analyses of furnace material properties in the Czochralski crystal growth method for silicon

Abstract

Reliability of the numerical simulation results strongly depends on the input data, in particular on the thermo-physical properties of the furnace components, e.g. graphite thermal conductivity and steel surface emissivity. Uncertainties are always involved in the measurement of these parameters. A set of global 2D simulations has been carried out in order to investigate the impact of each property on the growth conditions in Czochralski silicon growth furnaces. The results indicate that steel emissivity and felt conductivity have significant impact on the calculated thermal field and energy consumption.

Category

Academic article

Language

English

Author(s)

Affiliation

  • Norwegian University of Science and Technology
  • SINTEF Industry
  • SINTEF Industry / Metal Production and Processing

Year

2013

Published in

Measurement Science and Technology

ISSN

0957-0233

Publisher

IOP Publishing

Volume

24

Issue

1

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