Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching

Author(s)

• Christopher Andrew Dirdal
• Geir Uri Jensen
• Hallvard Angelskår
• Paul Conrad Vaagen Thrane
• Jo Gjessing
• Daniel Alfred Ordnung

Affiliation

• SINTEF Digital / Smart Sensors and Microsystems
• Unknown

Issue

10

DOI