Metal Films for MEMS Pressure Sensors: Comparison of Al, Ti, Al-Ti Alloy and Al/Ti Film Stacks
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Category
Academic chapter/article/Conference paper
Client
- Research Council of Norway (RCN) / 247781
Language
English
Author(s)
- Elizaveta Vereshchagina
- Erik Poppe
- Kari Schjølberg-Henriksen
- Markus Wöhrmann
- Sigurd Moe
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Fraunhofer Institute for Mechanics of Materials IWM
Year
2018Publisher
IEEE (Institute of Electrical and Electronics Engineers)
Book
2018 7th Electronic System-Integration Technology Conference (ESTC), Dresden, Germany, 18-21 Sept. 2018
ISBN
978-1-5386-6814-6