Piezoelectric thin film materials for MEMS
Category
Academic chapter/article/Conference paper
Language
English
Author(s)
- Andreas Vogl
- Frode Tyholdt
- Hannah Rosquist Tofteberg
- Paul Muralt
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Switzerland
Year
2015Publisher
Elsevier
Book
Handbook of Silicon based MEMS materials and Technologies. 2nd edition
ISBN
9780323312233
Page(s)
163 - 174