Anodic bonding of glass to aluminium
Category
Academic lecture
Language
English
Author(s)
- Henrik Jakobsen
- Kari Schjølberg-Henriksen
- Erik Poppe
- Sigurd Moe
- Maaike Margrete Visser Taklo
- Dag Thorstein Wang
Affiliation
- University of South-Eastern Norway
Presented at
Workshop on Wafer Bonding for MEMS
Place
Halle, Germany
Date
10.10.2004 - 12.10.2004