Publications

Papers

Kratzer, M.; Castaldi, L.; Heinz, B.; Mamazza, R.; Kaden, D.; Quenzer, H.; Wagner, B.; , "In-situ large scale deposition of PZT films by RF magnetron sputtering," Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials , vol., no., pp.1-4, 24-27 July 2011

Kaden, D.; Quenzer, H.; Wagner, B.; Kratzer, M.; Castaldi, L.; Heinz, B.; Mamazza, R.; , "Influence of platinum bottom electrode on the piezoelectric performance of hot RF sputtered PZT films," Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials , vol., no., pp.1-4, 24-27 July 2011

D. Kaden, H.-J. Quenzer, M. Kratzer, L. Castaldi, B. Wagner, B. Heinz, R. Mamazza; "Influence of platinum bottom electrodes on the piezoelectric performance of PZT thin films hot sputtered in a high volume production tool", Proc. MRS 2011, Boston, Vol. 1397

News

Mass producing super-thin films that can “squeeze” electricity, European commission 2014-06-18

Oerlikon PZT thin films - quality meets productivity, Oerlikon Systems Chip #15 2013 page 42-43

FP7 piezoVolume, CMM commercial micro manufacturing international Vol 6 No.2 

piezoMEMS competence centre established at SINTEF, MicroNews 7/02/13 ISSUE N°139 page 3

Oerlikon Systems Chip, Edition #14 2012, page 38-41 

Public project reports

Final summary report
D1.8 Report on integration, design and fabrication rules.
D2.5 PiezoMEMS design tutorial
D2.10 PiezoMEMS design platform (software)
D2.11 Final CSD cluster coater tool
D2.12 Final sputtering tool for high quality and high volume fabrication on 200 mm available
D2.13 Final wafer level in-line quality monitoring tool
D3.5 Device prototype, generation 2
D4.5 Final report for testing of device prototypes for performance, reliability and lifetime
D5.1 Market analysis
D5.4 Final CSD PZT cluster coater tool: Application note
D5.5 Final PZT in-situ sputtering tool: Application note
D5.6 piezoMEMS modelling and process emulation tools: Application note
D5.7 Dissemination of results by publications and open seminars. Exploitation assistance package

Presentations

COMS 2012 in Tønsberg, Norway, June 2012

piezoMEMS workshop in Lausanne, September 2011

COWIN event Helsinki, June 2011

Electroceramics XII, June 2010

Workshop in Aachen on piezoelectric MEMS, May 2010

Posters

Semicon Europe, October 2011

piezoMEMS workshop in Lausanne, September 2011

Project flyers

 

Published April 21, 2010

The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2010-2013) under grant agreement n° 229196