The way of designing a piezoMEMS component is revolutionary changed by constructing a MEMS device based on 3D parametric library components with underlying accurate behaviour models.

Traditionally the MEMS-designer must go through a process of trial and error of getting a complex design to be manufactured "as intended". Deep knowledge of the MEMS-processes involved may be required. This process is much more complicated when detailed process knowledge is not available, yet. Deep knowledge of the physics and materials science is also required in order to translate user requirements and specifications for the intended application to a workable MEMS design. Experienced use of FEM tools such as ABACUS may be combined with analytical (physical) models for validation and checking modeling results.

COVENTOR has developed a range of new design and modelling tools  (such as MEMS+ and CoventorWare) to enable different levels of modeling, including manufacturing processes, device and system design. Interfaces to other standard design tools are available. When calibrated to the PZT and MEMS- processes the tools let the designer simulate and optimize piezoMEMS designs before committing to build-and-test cycles. The MEMS designer may thus simulate end-product performance specs such as sensitivity, linearity, frequency response, signal-to-noise, and temperature stability. SEMulator3D is a useful visualization tool for virtual fabrication, enabling a review of designs and process steps. The MEMS design team may thus more easily detect process issues in advance of actual fabrication.

More information can be found in D5.6 piezoMEMS modelling and process emulation tools: Application note

Published April 5, 2013

3D model of piezoresonator
3D model of piezoresonator 


Ultrasonic transducer from Vermon generated by SEMulator3D. Cross-section of membrane with PZT.

The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2010-2013) under grant agreement n° 229196