Automated CSD system
Solar-Semi has developed a tool for the fully automated fabrication of piezo-ceramic films from chemical solutions. It consists of a specially adapter coater cluster, a RTP-furnace and the robotics for handling the wafers.

Highlights of the automated CSD tool:

  • RTP integrated into coating tool for PZT crystallisation
  • Crossed lamp arrays with 18 kW each below and on top of the wafer (36 kW in total).
  • Optimization of RTP heat radiation through independent control of upper lamp array
  • Wafer handling at the edges only to minimize thermal non-uniformity on coated PZT layers
  • Hermetically closed cabin permits operation under laminar flow conditions and prevents operators from coming into contact with toxic gases
  • High temperature hotplates (max. 450°C) for pyrolysis
  • Electrically controlled lifting pins in the hotplates permit arbitrary temperature profiles
  • Three precision media pumps for coating solutions.
  • Covered Chuck Technology and option for operation in open state
  • Solvent saturated atmosphere in parking position prevents dispensing nozzles from drying and keeps PZT destroying vapour away from the PZT.

Published December 11, 2012

The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2010-2013) under grant agreement n° 229196