piezoVolume will develop an automated micro-cluster tool for chemical solution deposition of PZT thin films.

CSD is a very versatile method as it provides excellent stoichiometry control and coverage of large surface areas. In this method a precursor solution of metal organics is deposited by spin-coating and dried/pyrolyzed. The resulting amorphous film is then crystallized after the desired thickness is reached. Before the piezoVolume project the state-of-the-art deposition was done manually on 100 mm wafer.

SINTEF together with Solar-Semi has used three approaches to enhance the throughput of CSD (chemical solution deposition):

  • Adapted an automated cluster coater available for photoresist coating in the semiconductor industry to CSD of PZT thin films.
  • Increased the wafer size to maximum 200 mm (with <2 % thickness uniformity)
  • Throughput aim: 4 wafers/h µm

CSD from solar-semiThe application procedures used for CSD are quite similar to what is used in the semiconductor industry for application of photoresist today, which is a proven high throughput process. The difference between the two processes is the number of coatings necessary to achieve the total film thickness.

piezoVolume has developed an automated micro-cluster tool for chemical solution deposition of PZT thin films. The cluster contains all necessary tools as solution delivery, spin coater, hot plate for pyrolysis, cooling plates and an integrated RTA (rapid thermal annealing) for crystallization. The tool is not only suitable to deposition of PZT, but also any other oxide material like (Ba,Sr)TiO3 for tuneable dielectrics.

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Published April 22, 2010



Photos from today's manual CSD


The research leading to these results has received funding from the European Community's Sixth, Seventh and H2020 Framework Programmes.