MEMS (Micro-Electro Mechanical Systems) with a piezoelectric thin film as active element (piezoMEMS) can fulfil many of the requirements of sensors and actuators in tomorrow’s smart systems, as a result of the large displacements, high sensing functionality and high energy densities that can be obtained, compared to pure Si-MEMS.


Published April 21, 2010

PZT processing

The research leading to these results has received funding from the European Community's Sixth, Seventh and H2020 Framework Programmes.