SINTEF piezoMEMS Competence Center

     

 

Technology

PZT
Applications
CSD of PZT
PLD of PZT
Quality monitoring of PZT
piezoMEMS modelling

 

Competence

  • Design, modelling and processing
  • PZT thin film deposition
  • Prototyping and small scale production

We cover the whole production process,
from design to packaging.

 

Services

Let SINTEF be your competence partner in piezoelectric microsystem development.

For more information please contact us

Piezoelectric materials

Piezoelectrics are among the most suited functional materials for electromechanical systems.

PZT is currently the dominating piezoelectric material when it comes to achieving high strains and forces at a given voltage.

SINTEF has also activities within PMN-PT thin films


 

Device examples

SINTEF piezoMEMS micropump

About MiNaLab

MiNaLab belongs to the SINTEF Digital department Microsystems and Nanotechnology. The 800 m2 cleanroom is located in Oslo, Norway. The lab has a complete MEMS processing line and lab areas dedicated to piezoMEMS.

 

 

www.minalab.no

http://www.piezomems.com

The research leading to these results has received funding from the European Community's Sixth, Seventh and H2020 Framework Programmes.