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Applications of PZT-based micromirrors

Applications of PZT-based micromirrors

Category
Conference lecture and academic presentation
Language
English
Author(s)
Affiliation
  • SINTEF ICT / Mikrosystemer og nanoteknologi
Presented at
piezoMEMS workshop 2016
Place
Grenoble
Date
23.05.2016 - 24.05.2016
Organizer
CEA LETI
Year
2016