High Volume Piezoelectric Thin Film Production Process for Microsystems
Category
Lecture
Language
English
Author(s)
- Paul Muralt
- Frode Tyholdt
Affiliation
- Unknown
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
2012 Joint IEEE International Symposium on the Applications of Ferroelectrics, European Conference on Applications of Polar Dielectrics & Workshop on Piezoresponse Force Microscopy
Place
Aveiro, Portugal
Date
09.07.2012 - 13.09.2012
Organizer
IEEE