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Piezoelectric MEMS development in SINTEF

Piezoelectric MEMS development in SINTEF

Category
Conference lecture and academic presentation
Client
  • Norges forskningsråd / 250184
Language
English
Author(s)
Affiliation
  • SINTEF ICT / Mikrosystemer og nanoteknologi
  • University of Oslo
  • SINTEF Materials and Chemistry / Tynnfilm og membranteknologi
Presented at
Piezo 2017 - Electroceramics for End-Users IX
Place
Cercedilla, Madrid
Date
18.02.2017 - 21.02.2017
Organizer
Instituto de Ciencia de Materiales de Madrid (ICMM)
Year
2017