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Piezoelectric thin film materials for MEMS

Piezoelectric thin film materials for MEMS

Category
D2 Articles in scholarly books/anthologies
Language
English
Year
2015
Published in
Handbook of Silicon based MEMS materials and Technologies. 2nd edition
Publisher
Elsevier
ISBN
9780323312233
Page(s)
163-174
Publication ID
CRIStin 1266894