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Piezoelectric thin film materials for MEMS

Piezoelectric thin film materials for MEMS

Category
Part of a book/report
Language
English
Author(s)
Affiliation
  • SINTEF ICT / Mikrosystemer og nanoteknologi
  • Switzerland
Year
2015
Publisher
Elsevier
Book
Handbook of Silicon based MEMS materials and Technologies. 2nd edition
ISBN
9780323312233
Page(s)
163 - 174