Micropump with active valves based on thin film PZT
Category
Poster
Language
English
Author(s)
- Hannah Rosquist Tofteberg
- Thor Bakke
- Andreas Vogl
- Michal Marek Mielnik
- Niels Peter Østbø
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Norwegian University of Science and Technology
Presented at
piezoMEMS 2014
Place
Kobe
Date
28.10.2014 - 29.10.2014
Organizer
Kobe University