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Microsystems and sensors

Microsystems and sensors

Microsystems are miniaturised systems that connect the physical to the digital world. A microsystem typically consists of a sensor, a processing unit and an actuator that triggers its operation. Nanotechnology is often integrated into microsystems to boost functionality and performance.

SINTEF provides services linked to sensor and microsystems development based on advanced silicon processing. SINTEF has a modern 800 m² clean room area equipped with a complete silicon processing line enabling both single-wafer and batch processing. SINTEF's core expertise lies in device design and simulation, process development and process integration. SINTEF is a leader in the integration of piezoelectric materials such as PZT in microsystems (MEMS) and has established its own “piezoMEMS Competence Center”.SINTEF’s uniqueness resides in our ability to carry your ideas from their embryonic stages through to a final product. We also provide R&D services in connection with small-scale/pre-series production.

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Research Director