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Microsystems and Nanotechnology

Microsystems and Nanotechnology

Research Director

This is MiNaLAb

The department of Microsystems and Nanotechnology at SINTEF has a
800 m² cleanroom in the MiNaLab building.

Our focus is on silicon sensor and actuator research, prototyping and small-scale production.

We offer

MiNaLab is ISO certified and the only independent complete silicon processing line in Norway.

The services offered by the department of Microsystems and Nanotechnology include feasibility studies, device design, prototyping, process development, and small and medium scale production in the MiNaLab cleanroom laboratory.
We are certified according to
ISO 14001, ISO 9001 and OHSAS 18001.

Both Norwegian and international industry use SINTEF MiNaLab for production of key components.

Research areas


Radiation sensors

MiNaLab offers research, design and production of advanced silicon radiation sensors from single and double sided strip sensors, pixel sensors to silicon drift diodes. The group is a leading supplier for industrial and scientific applications.


MEMS

MEMS (Micro-Electro-Mechanical-System) based sensors, e.g. pressure sensors and accelerometers, are small, lightweight, cost efficient and suitable for high volume production.


PiezoMEMS

The integration of piezoelectric PZT thin films with MEMS can fulfill many of the requirements of sensors and actuators in tomorrow's smart systems.


BioMEMS

Microsystems for medical and biological applications. We focus on nanotechnology enabled biosensors, sensors for in vivo measurements, and microfluidic technologies for Life Science research.


Optical MEMS

Micro-opto-electromechanical systems (MOEMS or optical MEMS), are systems with structures in the micro- to millimeter range whose purposes are to manipulate light. Today's MOEMS devices include waveguides, moving mirrors and diffractive gratings.

Application areas

Biomedical

Environmental

Aviation and space

Energy, oil and gas

Consumer electronics

Scientific and medical instrumentation

Contact

Visiting address:
Gaustadalléen 23 C
0373 Oslo, Norway
Map and directions

Postal address:
SINTEF ICT,
Microsystems and Nanotechnology (MiNaLab)
P.O. Box 124 Blindern
0314 Oslo, Norway

Research Director:
Fabrice Lapique