Due-Hansen Jon, Midtbø Kjersti, Poppe Erik, Summanwar Anand, Jensen Geir Uri, Breivik Lars, Wang Dag Thorstein (2011). CMUT Arrays with Polysilicon Bottom Electrodes and Nanometer Precisions Cavity Gaps. Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. Vestfold University College.

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References from Summanwar Anand