COVENTOR is a leading provider of 3D analysis and design automation software for the development of micro- and nano-scale devices and systems and will:
In terms of modelling the manufacturing processes, there are two approaches: simulations and emulation. The Process Simulation approach uses 3D numerical simulation to produce highly accurate models of the effects of chemical reactions involved in fabrication. The variety of process steps in MEMS fabrication, the large number of inputs, and the complexity of the calculations, however, render process simulation extremely time consuming or in most cases just not possible – due to the lack of adequate simulation tools. For MEMS applications, the process emulation approach is therefore preferred, which takes 2D masks and a description of the fabrication process to create a geometric 3D solid model. These models are built rather quickly and can subsequently be used for physical modelling.
Published May 18, 2010
3D model of piezoresonator
Piezo beam with RLC
The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2010-2013) under grant agreement n° 229196