Kratzer, M.; Castaldi, L.; Heinz, B.; Mamazza, R.; Kaden, D.; Quenzer, H.; Wagner, B.; , "In-situ large scale deposition of PZT films by RF magnetron sputtering," Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials , vol., no., pp.1-4, 24-27 July 2011
Kaden, D.; Quenzer, H.; Wagner, B.; Kratzer, M.; Castaldi, L.; Heinz, B.; Mamazza, R.; , "Influence of platinum bottom electrode on the piezoelectric performance of hot RF sputtered PZT films," Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials , vol., no., pp.1-4, 24-27 July 2011
D. Kaden, H.-J. Quenzer, M. Kratzer, L. Castaldi, B. Wagner, B. Heinz, R. Mamazza; "Influence of platinum bottom electrodes on the piezoelectric performance of PZT thin films hot sputtered in a high volume production tool", Proc. MRS 2011, Boston, Vol. 1397
FP7 piezoVolume, CMM commercial micro manufacturing international Vol 6 No.2
piezoMEMS competence centre established at SINTEF, MicroNews 7/02/13 ISSUE N°139 page 3
Oerlikon Systems Chip, Edition #14 2012, page 38-41
Final summary reportD1.8 Report on integration, design and fabrication rules. D2.5 PiezoMEMS design tutorialD2.10 PiezoMEMS design platform (software)D2.11 Final CSD cluster coater toolD2.12 Final sputtering tool for high quality and high volume fabrication on 200 mm availableD2.13 Final wafer level in-line quality monitoring toolD3.5 Device prototype, generation 2D4.5 Final report for testing of device prototypes for performance, reliability and lifetime D5.1 Market analysisD5.4 Final CSD PZT cluster coater tool: Application noteD5.5 Final PZT in-situ sputtering tool: Application noteD5.6 piezoMEMS modelling and process emulation tools: Application noteD5.7 Dissemination of results by publications and open seminars. Exploitation assistance package
COMS 2012 in Tønsberg, Norway, June 2012
piezoMEMS workshop in Lausanne, September 2011
COWIN event Helsinki, June 2011 piezoVolume - Frode Tyholdt
COWIN event Helsinki, June 2011
Electroceramics XII, June 2010
Workshop in Aachen on piezoelectric MEMS, May 2010
Semicon Europe, October 2011
Published April 19, 2013
The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2010-2013) under grant agreement n° 229196
