The MEMS-pie project:
Piezoelectric microsystems from the laboratory to production

                                              

  Sixth Framework Programme

 

Publications
  • H. Ræder, F. Tyholdt, W. Booij, N.P. Østbø, R. Bredesen, K. Prume, G. Rijnders, and P. Muralt, Taking piezoelectric microsystems from the laboratory to production, Accepted for publication in J. Electroceramics, 2007.
  • K. Prume, P. Muralt, F. Calame, T. Schmitz-Kempen, and Stephan Tiedke, Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devices, IEEE Trans. UFFC, 54:8–14, 2007.
  •  N.P. Østbø, W.E. Booij, H. Ræder, F. Tyholdt, F. Calame, and P. Muralt, MEMS-pie: The Integration of Piezo-Electric Thin Films In A SOI- MEMS Process, MST News (Published by VDI/VDE Innovation + Technik GmbH),  4 (2006) 40-42.
  •  W.E. Booij, A.N. Vogl, D.T. Wang, F. Tyholdt, N.P. Østbø, H. Ræder, and K. Prume, A simple and powerful analytical model for MEMS piezoelectric multimorphs, Accepted for publication in J. Electroceramics, 2007.
  •  F. Tyholdt, F. Calame, K. Prume H. Ræder, and P. Muralt, Chemically Derived Seeding Layer for {100}-textured PZT Thin Films, Accepted for publication in J. Electroceramics, 2007.
  •  K. Prume, P. Muralt, F. Calame, T. Schmitz-Kempen, and S. Tiedke: Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals, Accepted for publication in J. Electroceramics, 2007.

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Published December 14, 2006

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