High Volume Piezoelectric Thin Film Production Process for Microsystems
Kategori
Faglig foredrag
Språk
Engelsk
Forfatter(e)
- Paul Muralt
- Frode Tyholdt
Institusjon(er)
- Ukjent
- SINTEF Digital / Smart Sensors and Microsystems
Presentert på
2012 Joint IEEE International Symposium on the Applications of Ferroelectrics, European Conference on Applications of Polar Dielectrics & Workshop on Piezoresponse Force Microscopy
Sted
Aveiro, Portugal
Dato
09.07.2012 - 13.09.2012
Arrangør
IEEE